Simulation of system transmission values for different angles of incidence

Abstract

For the design of a new asphere measuring system, it is necessary to know transmission values for a system consisting of a source, an optional auxiliary filter and an optical filter, on which angle-tuning is performed. To generate these transmission values for different angles of incidence and polarizations a simulation program was created. Input data of the simulation were based on data provided by the manufacturers. Simulation results are presented for a sample of four systems. Simulation was deemed successful and accelerates the design process of the metrology system, since a large range of source and filter combinations can be evaluated swiftly. Limitations of the simulation are discussed as well.