{"title":"Possibilities of quantitative Makyoh topography","authors":"F. Riesz, I. Lukács","doi":"10.1109/ASDAM.2000.889484","DOIUrl":null,"url":null,"abstract":"Geometrical optical approaches to the reconstruction of surface topography from their Makyoh images are reviewed. A simple numerical algorithm is proposed for one-dimensional (1D) reconstruction. For the 2D case, the use of structured illumination is shown, and tentative results of an iterative algorithm are presented. Advantages and limitations of each method are discussed.","PeriodicalId":303962,"journal":{"name":"ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386)","volume":"309 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASDAM.2000.889484","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Geometrical optical approaches to the reconstruction of surface topography from their Makyoh images are reviewed. A simple numerical algorithm is proposed for one-dimensional (1D) reconstruction. For the 2D case, the use of structured illumination is shown, and tentative results of an iterative algorithm are presented. Advantages and limitations of each method are discussed.