Magnetically actuated CMOS micromachined cantilever-in-cantilever devices

Abstract

A CMOS-compatible magnetically actuated micromachined cantilever device is described. The structure employs the concept of nested cantilevers to enhance the angular deflection produced by Lorentz forces acting at the ends of each cantilever. Devices fabricated by two CMOS processes were tested. Static and dynamic bi-directional deflection responses were measured; static deflections of more than 2.5/spl deg/ and dynamic resonance deflections of 65/spl deg/ were obtained, Resonant frequencies were observed from 4.5 kHz to 56 kHz. Numerical simulations were performed and agree well with experiment.