Integration of tunable DBR-lasers with waveguides for heterodyne receiver OEIC applications using selective area MOVPE

Abstract

For the first time we present the integration of a tunable buried four-section DBR-laser butt coupled to a directional coupler based on semi-insulating strip loaded (InGaAsP/InP):Fe waveguides by using selective area epitaxy with large mask areas. Good planarity after the epitaxial regrowth of the waveguide layers has been achieved applying a special preparation of the laser mesa. Average coupling efficiencies of 52% and best values of 63% have been realized. The optical power of the guided light at each output port of the coupler exceeds 1 mW.<>