An ultra-small high-performance silicon microphone using single-crystalline silicon

Abstract

We have developed a prototype of an ultra-small high-performance condenser-type silicon microphone with a unique semiconductor microfabrication technology using extremely high-tensile-strength single-crystalline silicon, having both mass producibility and outstanding reliability. The microphone we fabricated has such acoustic characteristics as a wide frequency range of 30 Hz to 20 kHz, sensitivity of over -42 dB, and wide dynamic range of 134 dB/sub SPL/, sufficient for broadcasting and consumer use.