Stress sensing based on one dimensional photonic crystal nano beam

Abstract

We demonstrate a one-dimensional photonic crystal nano beam. The structure is formed by silicon waveguide. A Si₃N₄ layer is deposited above the waveguide. The thermal stress between Si/Si₃N₄ induces the deformation of beam and affects the transmission peak of slow light mode. The thermal stress can be detected by measuring the shift of peaks in transmission spectrum.