Ultra Low-Loss Silicon Waveguides for 200 mm Photonics Platform

2019 IEEE 16th International Conference on Group IV Photonics (GFP) Pub Date : 2019-08-01 DOI:10.1109/GROUP4.2019.8853923

C. Bellegarde, S. Bernabé, S. Brision, B. Charbonnier, D. Fowler, S. Garcia, P. Grosse, J. Hartmann, A. Myko, E. Pargon, C. Petit-Etienne, K. Ribaud, C. Sciancalepore, B. Szelag, Q. Wilmart, L. Youssef

引用次数: 4

Abstract

We demonstrate ultra-low optical losses in silicon waveguide by applying a smoothing annealing with no morphological deformation. We reach record-low losses at 1310nm with 0.1 dB/cm in single mode waveguide, while the performances of the other devices of the platform are preserved.

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200mm光子平台超低损耗硅波导

我们证明了超低光损耗的硅波导应用平滑退火无形态变形。我们在单模波导中以0.1 dB/cm的速度在1310nm处达到了创纪录的低损耗，同时保持了平台其他器件的性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2019 IEEE 16th International Conference on Group IV Photonics (GFP)

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