Le Yang, E. Randel, G. Vajente, A. Ananyeva, E. Gustafson, A. Markosyan, R. Bassiri, M. Fejer, C. Menoni
{"title":"Optical properties and mechanical loss of amorphous Ta2O5 thin films bombarded with low energy assist ions","authors":"Le Yang, E. Randel, G. Vajente, A. Ananyeva, E. Gustafson, A. Markosyan, R. Bassiri, M. Fejer, C. Menoni","doi":"10.1364/OIC.2019.FA.6","DOIUrl":null,"url":null,"abstract":"Amorphous tantala (Ta2O5) thin films were deposited by reactive ion beam sputtering with simultaneous low energy assist Ar+ or Ar++O2+ bombardment. The films absorption and mechanical losses are not significantly affected by the ion bombardment.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"104 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.FA.6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Amorphous tantala (Ta2O5) thin films were deposited by reactive ion beam sputtering with simultaneous low energy assist Ar+ or Ar++O2+ bombardment. The films absorption and mechanical losses are not significantly affected by the ion bombardment.
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