Environmental-Friendly Fluorine Mixture for Cvd Cleaning Processes to Replace C2f6 and Nf3 under Industrial Conditions

Abstract

During the climate conference in Paris a binding and universal climate target was established. It was agreed to limit the temperature increase to a maximum of 2 C° until 2100 [1]. The most relevant climate gas is CO2, considered as a primary greenhouse gas with a significant impact on global warming.