Abstractions for Modeling the Effects of Wall Surface Roughness in Silicon Photonic Microring Resonators

Pratishtha Agnihotri, Lawrence M. Schlitt, P. Kalla, S. Blair
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Abstract

Microring resonators (MRRs) are one of the key components of many on-chip optical interconnect wavelength-division multiplexing (WDM) network architectures, often fab-ricated in Silicon Photonics. The operation of these devices is extremely sensitive to variations in the fabrication process. Wall surface roughness (WSR) is one such process variation that affects MRR's performance. Analyzing the effect of WSR on MRR's performance requires full-scale FDTD simulations, which is costly for testing and validation of silicon photonic circuits. This paper proposes an abstract mathematical model to estimate the impact of WSR on the shift in the resonant wavelength of MRRs. We show that WSR can be approximated using a quasi-grating - in particular, a “notch perturbation” in the ring waveguide. Since the effect of notches can be described using the well understood perturbation theory, analysis of the effect of WSR using notches can be performed using eigenmode solvers. Experiments depict that our abstraction is quite accurate to full-scale FDTD simulations, but is orders of magnitude faster.
硅光子微环谐振腔壁面粗糙度影响的建模
微环谐振器(mrr)是许多片上光互连波分复用(WDM)网络架构的关键部件之一,通常在硅光子学中制造。这些装置的操作对制造过程中的变化极为敏感。壁面粗糙度(WSR)是影响MRR性能的一种工艺变化。分析WSR对MRR性能的影响需要全尺寸FDTD仿真,这对于硅光子电路的测试和验证是昂贵的。本文提出了一个抽象的数学模型来估计波差对磁阻共振波长偏移的影响。我们表明,WSR可以近似使用准光栅-特别是环形波导中的“陷波扰动”。由于缺口的影响可以用很好理解的微扰理论来描述,使用缺口的WSR影响的分析可以使用特征模解算器来执行。实验表明,我们的抽象是相当准确的全尺寸FDTD模拟,但是数量级快。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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