{"title":"Different Methods of MEMS Simulations in Matlab/SIMULINK","authors":"J. Nazdrowicz","doi":"10.23919/MIXDES.2018.8436943","DOIUrl":null,"url":null,"abstract":"In this paper there are modelling and simulation capabilities of MEMS motion sensors in Matlab/SIMULINK environment. In each model there is different approach applied, therefore author presents his proposal of mathematical, electrical equivalent and physical models. Results obtained from all of them are similar or identical and are presented here. Author also takes into consideration on crucial modelling aspects which in each of these approaches.","PeriodicalId":349007,"journal":{"name":"2018 25th International Conference \"Mixed Design of Integrated Circuits and System\" (MIXDES)","volume":"288 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 25th International Conference \"Mixed Design of Integrated Circuits and System\" (MIXDES)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/MIXDES.2018.8436943","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this paper there are modelling and simulation capabilities of MEMS motion sensors in Matlab/SIMULINK environment. In each model there is different approach applied, therefore author presents his proposal of mathematical, electrical equivalent and physical models. Results obtained from all of them are similar or identical and are presented here. Author also takes into consideration on crucial modelling aspects which in each of these approaches.