Design, Fabrication and Characterization of Subfield Addressing in Micromirror Arrays for Smart Window Applications

Abstract

We report on the adaptation of display driving schemes from visual display technology to our MEMS based micromirror arrays to enable actuation of subgroups (subfields) independent of each other in a single module. Concept and design of a passive subfield addressing of micromirror arrays, as well as our experimental results from the fabrication and actuation are succinctly presented and discussed.