Demonstration of waveguide-coupled sidewalled grating filters on SOI

V. Veerasubramanian, G. Beaudin, A. Giguère, B. Le Drogoff, V. Aimez, A. Kirk
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引用次数: 1

Abstract

We report on the demonstration of waveguide coupled side-walled grating filter fabricated on SOI using e-beam lithography. We obtain a dropped channel extinction of 20 dB and a flat top response using coupled cavities.
SOI上波导耦合侧壁光栅滤波器的演示
本文报道了用电子束光刻技术在SOI上制备波导耦合侧壁光栅滤波器的演示。我们利用耦合腔获得了20 dB的下降信道消光和平顶响应。
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