Miniaturized piezo-actuated adaptive prism for biaxial optical scanning

Abstract

We present a biaxial adaptive prism that allows for a simplified light path compared to scanning mirrors. Using three piezo bimorph actuators with stepless control, we actively tilt a fluid-glass interface, achieving scan angles up to 8.5° with response times down to 5.5 ms. The compact and optimized design has an outer diameter of 33 mm for a 7 mm aperture.