An Ultra-Thin Decoupling Capacitor with SrTiO3thin film on polyimide

Abstract

An ultra-thin decoupling capacitor device has been developed, and its thickness and volume are one-seventh and one-third of those of conventional ceramics capacitors, respectively. Low temperature deposition of high dielectric constant SrTiO3thin film and flexible polyimide film as a base material make the capacitor smaller drastically. Mn impurity doping into SrTiO3improves the capacitor reliability and Mo-based electrode successfully prevents the polyimide film contraction. The capacitor shows a large capacitance density of 3.2 nF/mm2, and low leakage current of 10-7A/cm2at 10V with only a 40 μm thickness. This capacitor device is suitable for developing eco-friendly electronic products.