Glass passivated structure for high power thyristors

Abstract

A low cost and reliable glass passivated structure for 35 Arms thyristors has been manufactured using sealed tube diffusions, mesa etching from both sides of the wafer and a lift-off metallisation technique. Best trade-off I/sub G_T_/d/spl nu//dt performance has been designed using two dimensional simulation of triggering mechanisms, followed by experimental validation of calculated values.