320×240 oversampled digital single photon counting image sensor

Abstract

A 320×240 single photon avalanche diode (SPAD) based single photon counting image sensor is implemented in 0.13μm imaging CMOS with state of the art 8μm pixel pitch at 26.8% fill factor. The imager is demonstrated operating as a global shutter (GS) oversampled binary image sensor reading out at 5.14kFPS. Frames are accumulated in real time on FPGA to construct a 256 photon/8bit output image at 20FPS.