Design and simulation of a integrated Mach-Zehnder interferometer sensor

Abstract

In this paper we present the simulation results of a proposed integrated Mach-Zehnder interferometer sensor. The sensor can be fabricated from polymeric materials like SU8 and PMMA using the e-beam lithography. The numerical simulations consider the detection of the analysis medium refractive index ranging from 1.33 to 1.36.