Dynamics and control of micromachined gyroscopes

Abstract

We summarize principles of operation of micromachined gyroscopes, analyze dynamics of ideal and non-ideal systems, and propose an approach for formulation and solving problems of control. The suggested approach uses active nonlinear feedback control for drive and compensation of errors. Both non-adaptive and adaptive strategies are presented. These strategies can be used for a broad class of micromachined vibratory gyroscopes including those for angle and angular rate measurement.