J. Moon, I. Tuokko, A. Suominen, A. Tuominen, D. Oh, B. K. Park, H. Kim
{"title":"Hydrogen sensing performance of TiO2 nanotubes at room temperature","authors":"J. Moon, I. Tuokko, A. Suominen, A. Tuominen, D. Oh, B. K. Park, H. Kim","doi":"10.1109/BEC.2010.5631500","DOIUrl":null,"url":null,"abstract":"We report the hydrogen sensing properties of a sensor using TiO2 nanotube arrays. The TiO2 nanotube arrays were fabricated by anodization on titanium foil, in an electrolyte containing 0.5 wt% hydrofluoric acid mixed with water, the electric potential being 15V. TiO2 nanotube arrays were annealed at 600 Celsius for 1 h. The sensors were equipped with platinum electrodes. These two were connected with a metal wire using silver paste. The measurements of the sensor's electrical resistance were performed in NTP. The hydrogen sensor using TiO2 nanotube arrays shows a linear sensitivity with various hydrogen concentrations. After repeating exposure to hydrogen at room temperature, the sensor's resistance indicated a stable recovery to its initial resistance. The reproducibility of this exam is reliable.","PeriodicalId":228594,"journal":{"name":"2010 12th Biennial Baltic Electronics Conference","volume":"229 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 12th Biennial Baltic Electronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/BEC.2010.5631500","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We report the hydrogen sensing properties of a sensor using TiO2 nanotube arrays. The TiO2 nanotube arrays were fabricated by anodization on titanium foil, in an electrolyte containing 0.5 wt% hydrofluoric acid mixed with water, the electric potential being 15V. TiO2 nanotube arrays were annealed at 600 Celsius for 1 h. The sensors were equipped with platinum electrodes. These two were connected with a metal wire using silver paste. The measurements of the sensor's electrical resistance were performed in NTP. The hydrogen sensor using TiO2 nanotube arrays shows a linear sensitivity with various hydrogen concentrations. After repeating exposure to hydrogen at room temperature, the sensor's resistance indicated a stable recovery to its initial resistance. The reproducibility of this exam is reliable.