Characteristics of coupled microcircular lasers confined by insulator SiO2 and metal layer with an output waveguide

Jian-Dong Lin, Yongzhen Huang, Q. Yao, X. Lv, Yuede Yang, J. Xiao, Yun Du
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Abstract

Coupled microcircular lasers with an output waveguide laterally confined by insulator SiO2 and p-electrode metal are fabricated by conventional photolithography and inductively coupled-plasma etching technique. Mode characteristics are numerically investigated by FDTD technique.
具有输出波导的绝缘体SiO2和金属层耦合微圆激光器的特性
采用传统光刻和电感耦合等离子体刻蚀技术制备了输出波导侧向受绝缘体SiO2和p电极金属约束的耦合微圆激光器。利用时域有限差分技术对其模态特性进行了数值研究。
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