Laser Processed Miniature LiTaO3Resonators and Monolithics Filters

Abstract

Because o f i t ' s h i g h Q and large electro-mechanica l coup l i ng coe f f i c i en t , L i t h ium Tan ta la te (LiTaO,) i s a very a t t rac t i ve mater ia l fo r p iezoe lec t r i c resonators and m o n o l i t h i c f i l t e r s which cannot be r e a l i z e d by Quartz or Ceramics. Theses p roper t i es and good f r e quency temperature character is t ics [ l ] a l l o w r e a l i z a t i o n o f l a r g e r e l a t i v e b a n d w i d t h f i l t e r s and l a r g e resonance frequency sh i f t r esona to rs . On the other hand, min ia ture resonators and m o n o l i t h i c f i l t e r s a r e expanding rapidly : They are used espec ia l l y i n mob i l e equipments such as portable measuring instruments, c e l l u l a r Radio, conventional mobile radio, electronic clocks... [ 2 ] .