Research of Micro-Displacement Self-Sensing Testing System for Micro-Driving Device

Abstract

In the study of micro-processing equipment, the use of GMM-driven micro-feed device can realize the micro-displacement feed, Based on the principle of elastic plate deformation between its elastic micro-strain and the device's micro-displacement, a micro-displacement self-sensing sensor systems based on LabVIEW is designed.Research shows that the micro-displacement self-sensing system can achieve the micro-displacement signal acquisition.