An on chip signal processing and Fabry-Perot sensor using multi-slopes architecture

Abstract

In this paper, a Fabry-Perot based optical smart sensor and some of its advantages and applications are discussed. Basics of optical sensors and tight intensity modulations, with regard to the smart sensor, are discussed. The CMOS/MEMS implementation and fabrication of a Fabry-Perot sensor and it's companion photodiode are shown. This companion photodiode of Fabry-Perot converts the filtered light intensity into an electrical signal. A CMOS integrated circuit is designed for the signal conditioning and processing of photodiode electrical signal. Using the CMOS integrated circuit, the analog signal is converted into a digital form and is available in an 8-bit bus for further processing.