Mario Hauser, T. Grossmann, S. Schleede, J. Fischer, T. Beck, H. Kalt, C. Vannahme, T. Mappes
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引用次数: 0
Abstract
We report on the fabrication of high-Q microresonators made of poly(methyl methacrylate) (PMMA) with a conical shape due to a thermal reflow step. The cavity quality factor is above 2-106 in the 1300 nm wavelength range.