Ultra-precision micro structuring by means of mechanical machining

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Pub Date : 2001-01-21 DOI:10.1109/MEMSYS.2001.906469

T. Kawai, K. Sawada, Y. Takeuchi

引用次数: 14

Abstract

A variety of microstructures with high accuracy were introduced by means of mechanical machining technology, using the authors' super-nano friction free machine.

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机械加工的超精密微结构

利用自制的超纳米无摩擦机床，通过机械加工技术，引入了各种高精度的显微组织。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)

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