About phase components of differential-phase LBIC from p-n junction transversal plane scanning

Abstract

Theoretical model of how LBIC signal from p-n junction being scanned by two laser beams is formed was proposed. Physical effects which make impact in overall phase of the LBIC signal were pointed out. Experimental research of illuminating surface of laser diode was conducted. Experimental dependencies of the phase of LBIC signal on the coordinate of scanning laser beams were obtained. Possibilities of how differential-phase method can be used to inspect semiconductor surfaces with p-n junctions were analyzed.