Pt Resistive Film Sensors

Abstract

Temperature sensors are being widely used in various aspects of our lives. One of the most important areas of their application is environmental monitoring. In air velocity measurements resistive temperature detectors are often used. For this reason, as an initial step in development of novel thermo-anemometer that will allow 3D wind speed measurements, a series of Pt resistive film sensors that combine custom made thin-film material and thick-film technology was realized. In this paper these sensors will be presented from design and manufacturing stage to evaluation of sensor performances.