A window-shaped resonator nanostructure based on an MIM waveguide for refractive index sensing

Xiaoyu Zhang, Jiamin Cui, Jilai Liu, Zhanbo Chen, Feng Wen, S. Yan
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Abstract

Optical sensors have many advantages such as anti-electromagnetic interference, fast response speed and low power consumption. However, the optical sensor cannot be further integrated due to the existence of diffraction limit. SPPs can overcome the diffraction limit and manipulate the optical signal in the subwavelength range, realizing the miniaturization of optical devices at the nanometer level. In this work, we presented an innovative sensor structure, which consists of a Window -Shaped Ring Resonator (WSRR) and a metal-insulator-metal (MIM) waveguide. The finite element method (FEM) was used to simulate the sensor characteristics. We analyzed the cause of Fano resonance, and optimized the performances of sensor by altering the parameters of the structure. The best sensitivity of the proposed structure is 1480 nm/RIU and the figure of merit (FOM) is 98.7. The presented refractive index sensor has promising applications in material sensing detection.
一种基于MIM波导的折射率传感窗口型谐振腔纳米结构
光学传感器具有抗电磁干扰、响应速度快、功耗低等优点。然而,由于衍射极限的存在,光学传感器无法进一步集成。spp可以克服衍射极限,在亚波长范围内操纵光信号,实现光器件在纳米级的小型化。在这项工作中,我们提出了一种创新的传感器结构,它由一个窗口形环形谐振器(WSRR)和一个金属-绝缘体-金属(MIM)波导组成。采用有限元法对传感器特性进行了仿真。分析了法诺共振产生的原因,并通过改变结构参数来优化传感器的性能。该结构的最佳灵敏度为1480 nm/RIU,性能值(FOM)为98.7。所提出的折射率传感器在材料传感检测中具有广阔的应用前景。
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