Titanium Materials for UHV/XHV Systems

Abstract

Outgassing properties and surface profiles of titanium materials have been investigated in this paper. Titanium materials showed excellent outgassing rates below 10-12 Pams-1 after baking process. These values are two orders of magnitude smaller than that for standard vacuum materials under the same pre-baking condition. Outgassing rates of the pure titanium of JIS grade 2, titanium alloy, KS100, are about 1/4 of that for a stainless steel without baking process. Titanium materials are applicable for the vacuum chamber and vacuum components. The vacuum equipment made of the titanium material has excellent vacuum performance, e.g., very quick evacuation and UHV/XHV pressures are easily obtainable