Plasma emission spectroscopy related to the optical properties of silicon oxynitride films for inhomogeneous filters

Ramón Rodríguez López Rrl, Noemi Abundiz Cisneros Nac, Roberto Sanginés de Castro RSC, Juan Águila Muñoz Jam, Roberto Machorro Mejía RMM.
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Abstract

The optical plasma spectroscopy was correlated with the optical properties of SiNxOy synthesized by reactive magnetron sputtering. A principal component analysis of the system data was developed to monitor the synthesis of inhomogeneous filters.
等离子体发射光谱与非均匀滤光片氧化氮化硅薄膜光学特性的关系
等离子体光谱与反应磁控溅射合成的SiNxOy的光学性质相关。开发了系统数据的主成分分析,以监测非均匀滤波器的合成。
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