{"title":"Plasma emission spectroscopy related to the optical properties of silicon oxynitride films for inhomogeneous filters","authors":"Ramón Rodríguez López Rrl, Noemi Abundiz Cisneros Nac, Roberto Sanginés de Castro RSC, Juan Águila Muñoz Jam, Roberto Machorro Mejía RMM.","doi":"10.1364/oic.2022.wc.6","DOIUrl":null,"url":null,"abstract":"The optical plasma spectroscopy was correlated with the optical properties of SiNxOy synthesized by reactive magnetron sputtering. A principal component analysis of the system data was developed to monitor the synthesis of inhomogeneous filters.","PeriodicalId":301400,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2022","volume":"148 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2022","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oic.2022.wc.6","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The optical plasma spectroscopy was correlated with the optical properties of SiNxOy synthesized by reactive magnetron sputtering. A principal component analysis of the system data was developed to monitor the synthesis of inhomogeneous filters.