CVD Monolayer tungsten-based PMOS Transistor with high performance at Vds = -1 V

Abstract

Two-dimensional (2D) semiconducting materials channels enable ultimate scaling of transistors and will help Moore's Law Scaling for decades. In this paper, we reported p-type WSe2transistors using monolayer (¬0.85 nm) channels by molten-salt-assisted chemical vapor deposition. The transfer-free back-gate devices fabricated based on 100 nm SiO2/Si substrate exhibit highest on current at Vds= -1 V among transistors of monolayer p-WSe2, and a high on/off ratio up to 108.