Vertically arranged microelectrode array for electrochemical sensing

Abstract

We have developed a thin film cell consisting of a vertically arranged interdigital array (IDA) of electrodes with a continuous Pt-basis and an Y/sub 2/O/sub 3/ insulation layer in the middle separating the upper Pt IDA electrodes. We have optimized the technology of preparation of Y/sub 2/O/sub 3/ thin films with suitable electrical and mechanical properties. The electrochemical cell has been tested by cyclic voltammetry using the redox couple [Fe(CN)/sub 6/]/sup 3-/4-/ in an electrolyte and the redox recycling phenomenon was demonstrated under these conditions.