Advances in solid-state array technology for microwave and millimeter-wave applications

C. Liang, S. Rosenau, W.-K. Zhang, C. Chang, C. Domier, N. Luhmann
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引用次数: 2

Abstract

Millimeter wave solid state array technology has broad applicability in areas ranging from radar and nondestructive testing to cancer hypertherapy and plasma diagnostics and is actively under investigation at UC Davis. Phased antenna arrays utilizing Schottky varactor loaded transmission lines as the phase controlling elements have been designed, simulated, fabricated and are being tested. Broadband quasi-optical overmoded waveguide frequency multiplier grid array systems have been designed, simulated, fabricated and are under test with a goal of providing Watt level output powers from 50-200 GHz. Micro-electromechanical systems (MEMS) based switch and capacitor arrays have been designed and fabricated on silicon wafers with traditional IC processing techniques, resulting in devices with physical dimensions on the order of a few tens of microns.
微波和毫米波应用的固态阵列技术进展
毫米波固态阵列技术在从雷达和无损检测到癌症治疗和等离子诊断等领域具有广泛的适用性,并且正在加州大学戴维斯分校进行积极的研究。利用肖特基变容管负载传输线作为相位控制元件的相控天线阵列已经设计、模拟、制造并正在测试中。宽带准光超模波导倍频网格阵列系统已经设计、模拟、制造并正在测试中,目标是提供50-200 GHz的瓦特级输出功率。基于微机电系统(MEMS)的开关和电容阵列已经用传统的集成电路加工技术在硅片上设计和制造,从而产生物理尺寸在几十微米量级的器件。
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