Humidity Sensor Based on Thin-Film Piezoelectric-on-Substrate Resonator and MoS2 for Multifunctional Applications

Abstract

This work proposed a thin-film piezoelectric-on-substrate (TPoS) resonator based humidity sensor with Molybdenum disulfide (MoS2) film as sensing material. The small size resonator provided advantages of high stability and high resolution and the MoS2 contributed high sensitivity. The proposed humidity sensor performed with sensitivity of 434 Hz/%RH, high stability of below 0.367%, fast response time of 1.8 s and recovery time of 2.8 s. The sensor is potential for multifunctional applications for its good properties. We demonstrated the sensor's performance in human breath analysis and detection of finger's moving in a noncontact way as examples.