PZT based bulk acoustic wave RF filters

2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) Pub Date : 2001-10-22 DOI:10.1109/ICSICT.2001.981606

T. Ren, Yanxiang Liu, Jianshe Liu, Litian Liu, Zhijian Li

引用次数: 8

Abstract

Analytical solutions of the wave equation for the electrode-piezoelectric-electrode sandwich structure in film bulk acoustic resonators (FBARs) are presented. The impedance for PZT based FBAR is derived utilizing proper boundary conditions and their material parameters. A novel method to adjust the resonant frequency is proposed corresponding to the process feasibility and material properties. Ferroelectric-based RF filters composed of FBARs are designed.

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基于PZT的体声波射频滤波器

给出了薄膜体声谐振器(fbar)中电极-压电-电极夹层结构波动方程的解析解。利用适当的边界条件和材料参数，推导了压电陶瓷FBAR的阻抗。根据工艺可行性和材料特性，提出了一种调整谐振频率的新方法。设计了由fbar组成的基于铁电的射频滤波器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)

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