{"title":"Trajectory morphing applied to epitaxial thin film growth","authors":"A. Engelmann, D. Meyer, J. Hauser, R. Caflisch","doi":"10.1109/ACC.1999.782435","DOIUrl":null,"url":null,"abstract":"Several recent developments have made it possible to begin exploring in formal ways the trajectory space of epitaxial growth during molecular beam epitaxy. This paper reviews the fundamentals of trajectory morphing and presents results showing that trajectory morphing may be used to explore the trajectory space of an epitaxial thin film growth system. We have derived a simplified growth model, suitable for use in morphing, and this is also presented. are reviewed.","PeriodicalId":441363,"journal":{"name":"Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251)","volume":"62 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ACC.1999.782435","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Several recent developments have made it possible to begin exploring in formal ways the trajectory space of epitaxial growth during molecular beam epitaxy. This paper reviews the fundamentals of trajectory morphing and presents results showing that trajectory morphing may be used to explore the trajectory space of an epitaxial thin film growth system. We have derived a simplified growth model, suitable for use in morphing, and this is also presented. are reviewed.