Merging SoC and LOC together

Abstract

A promising combination of the semiconductor integrated system-on-a-chip (SoC) with the lab-on-a-chip (LOC) is brought in this paper. In this paper, we propose a new technology which enables monolithic integration of the self-assembled biological system, the MEMS structure, the microfluidic system, and CMOS electronic circuits together. Utilizing this approach, more functionality is introduced into the SoC, while the LOC becomes more intelligent and controllable. A post-CMOS fabrication approach that meets the requirements is demonstrated to validate the idea.