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Trench Isolation Schemes for Bipolar Devices --- Benefits and Limiting Aspects

ESSDERC '87: 17th European Solid State Device Research Conference Pub Date : 1987-09-01 DOI:10.1007/978-3-642-74360-3_4
H. Goto, K. Inayoshi
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双极器件沟槽隔离方案——优点和局限性
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ESSDERC '87: 17th European Solid State Device Research Conference
ESSDERC '87: 17th European Solid State Device Research Conference
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