Mechanical loading effect of rectangularly-shaped shallow electrodes on SAW devices

A. Baghai-Wadji, A. Maradudin, F. Hickernell, D. Penunuri
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引用次数: 2

Abstract

We present a perturbation analysis of mechanical loading effect for rectangularly-shaped shallow electrodes on SAW devices. The model utilized assumes on the plane surface of a piezoelectric semi-space a layer of thickness d with piecewise constant material constitution. The method relies on eigenequations of the form L/spl psi//spl I.oarr/=/spl part//sub z//spl psi//spl I.oarr/. Our analysis technique provides a convenient perturbative solution of this equation in the substrate and layer regions subject to certain interface and boundary conditions. We validate our theory by calculating the dispersion curves related to waves propagating along corrugated surfaces.
矩形浅电极在SAW器件上的机械载荷效应
本文对SAW器件上矩形浅电极的机械载荷效应进行了微扰分析。所采用的模型假定在压电半空间的平面上有一层厚度为d的层,该层的材料构成是分段恒定的。该方法依赖于形式为L/spl psi//spl I.oarr/=/spl part//sub //spl psi//spl I.oarr/的特征方程。我们的分析技术提供了在一定的界面和边界条件下的衬底和层区域中该方程的方便的微扰解。我们通过计算波沿波纹表面传播的色散曲线来验证我们的理论。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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