A novel MEMS gas sensor with effective combination of high sensitivity and high selectivity

Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002. Pub Date : 2002-05-28 DOI:10.1109/ISAF.2002.1195970

Jia Zhou, Po Li, Song Zhang, Feng Zhou, Yipin Huang, Pengyuan Yang, M. Bao

引用次数: 12

Abstract

A, novel MEMS gas sensor including a PZT thin film layer and a zeolite layer is developed in this paper, which shows effective combination of high sensitivity and high selectivity. Working in resonating mode, the sensor depicts the mass loading due to molecular adsorption of the zeolite by the frequency shift. The relationship between the frequency shift in percent and the concentration of Freon is linear. The minimum mass loading of 3.5 /spl times/ 10/sup -9/ and the sensitivity of -0.0024%/ppm can be determined from the experimental results.

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一种新型的MEMS气体传感器，有效地结合了高灵敏度和高选择性

本文研制了一种新型的由PZT薄膜层和沸石层组成的MEMS气体传感器，该传感器实现了高灵敏度和高选择性的有效结合。在谐振模式下工作，传感器通过频移描绘沸石分子吸附引起的质量负载。频移百分数与氟里昂浓度呈线性关系。实验结果可确定最小质量载荷为3.5 /spl倍/ 10/sup -9/，灵敏度为-0.0024%/ppm。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.

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