High Resolution Table-top Coherent Diffractive Imaging of Extended Samples

G. Tadesse, W. Eschen, R. Klas, S. Demmler, A. Tünnermann, J. Limpert, J. Rothhardt
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Abstract

We present a table-top coherent diffractive imaging setup based on a laser-driven high-order harmonic source at 68.6 eV that can achieve resolutions of sub-20 nm in an extended field of view of 50 × 50 μm2.
扩展样品的高分辨率桌面相干衍射成像
提出了一种基于68.6 eV激光驱动高次谐波源的台式相干衍射成像装置,该装置在50 × 50 μm2的扩展视场范围内实现了低于20 nm的分辨率。
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