Yi Jiang, Junjing Deng, J. Klug, Yudong Yao, C. Preissner, C. Roehrig, Z. Cai, B. Lai, S. Vogt
{"title":"High-resolution ptychoraphic imaging of large-scale integrated circuits (Conference Presentation)","authors":"Yi Jiang, Junjing Deng, J. Klug, Yudong Yao, C. Preissner, C. Roehrig, Z. Cai, B. Lai, S. Vogt","doi":"10.1117/12.2527505","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":128745,"journal":{"name":"X-Ray Nanoimaging: Instruments and Methods IV","volume":"9 10","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"X-Ray Nanoimaging: Instruments and Methods IV","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2527505","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}