Chen-Guan Lee, Tanvi Joshi, K. Divakar, A. Dodabalapur
{"title":"Circuit applications based on solution-processed zinc-tin oxide TFTs","authors":"Chen-Guan Lee, Tanvi Joshi, K. Divakar, A. Dodabalapur","doi":"10.1109/DRC.2011.5994517","DOIUrl":null,"url":null,"abstract":"Amorphous oxide semiconductors (AOS) have been extensively studied for circuit applications, such as inverters [1], oscillators [2], and memory devices [3]. Most of the AOS-based TFTs used in the circuits are processed with high-vacuum systems even though solution-based processes have the advantages of easy processing, low fabrication cost and potential for large coverage area. In this paper, we demonstrate circuits based on solution-processed zinc-tin oxide (ZTO) TFTs, including inverters, ring oscillators and amplifiers. Performance uniformity and circuit functionality have been achieved with solution-based processing technique.","PeriodicalId":107059,"journal":{"name":"69th Device Research Conference","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2011-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"69th Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.2011.5994517","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
Amorphous oxide semiconductors (AOS) have been extensively studied for circuit applications, such as inverters [1], oscillators [2], and memory devices [3]. Most of the AOS-based TFTs used in the circuits are processed with high-vacuum systems even though solution-based processes have the advantages of easy processing, low fabrication cost and potential for large coverage area. In this paper, we demonstrate circuits based on solution-processed zinc-tin oxide (ZTO) TFTs, including inverters, ring oscillators and amplifiers. Performance uniformity and circuit functionality have been achieved with solution-based processing technique.