Modification of Stresses in Evaporated Hafnia Coatings for Use in Vacuum

Pub Date : 2010-06-06 DOI:10.1364/OIC.2010.WD6
James B. Oliver, P. Kupinski, A. Rigatti, Ansgar W. Schmid, J. Lambropoulos, S. Papernov, Alexei Kozlov, Robert D. Hand
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引用次数: 5

Abstract

Tensile stresses in hafnia/silica coatings used in vacuum are modified by changes in process variables and design. Stress aging is extended through the use of thin-layer designs, but long-term improvements in stress are not realized.
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真空蒸发铪涂层应力的改变
真空中使用的铪/二氧化硅涂层的拉伸应力可以通过工艺变量和设计的变化而改变。使用薄层设计可以延长应力老化,但不能实现应力的长期改善。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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